贝意克二维材料生长CVD系统
- 品名： 贝意克二维材料生长CVD系统
- 型号： BTF-1200C-400C-SL
- 产品详情
- 规格参数
主要特点Main features
前端配有预热炉，可用于蒸发固态源
Equipped with a preheating furnace for evaporating solid state sources
加热炉选用滑轨炉，可实现快速升温/降温，缩短实验时间
Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.
法兰端采用卡箍密封，这样就使进料出料更加的方便。
The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
进气系统可以按照客户的实验需求配置几路质量流量计，流量计的量程也可以选择不同的配置，真空系统也可以根据客户的需求选择配置各种真空泵。
Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements
技术参数Technical Parameters
Preheating Furnace预热炉 | |
Max. Temp | 400℃ |
温区长度zone length | 100mm |
Heating furnace滑轨炉 | |
Max. Temp | 1200℃ |
Power 功率 | 2KW (220V) |
温区长度zone length | Heating：440mm Constant：200mm |
Temperature Controller 控温方式 | lPID automatic control and auto-tune function. 模糊PID控制和自整定调节 l30 programmable segments for precise thermal processing. 智能化30段可编程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超温和断偶报警功能 |
Heating Elements 加热元件 | ·Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝（掺钼铁铬铝合金） |
Temperature Accuracy 控温精度 | +/- 1℃ |
Processing tube 炉管 | Size：Φ50*1650mm 尺寸：Φ50*1650mm |
Gas supply system气路系统 | |
连接头类型Connector style | 双卡套不锈钢接头Double cutting ferrule stainless steel connector |
标准量程（N2)Standard range(N2) | 50sccm、100sccm、200sccm、500sccm； （可根据用户要求定制）optional |
准确度Accuracy | ·±1.5%FS |
响应时间Response time | Gas characteristics：1～4sec 气特性 Electrical characteristics:10sec 电特性 |
线性Linearity | ±0.5～1.5% |
Working pressure difference range 工作压差范围 | 0.1～0.5MPa |
Max. pressure**压力 | 3MPa |
压力真空表Pressure vacuum gauge | －0.1～0.15 MPa, 0.01 MPa/格 |
Vacuum unit真空系统 | |
空气相对湿度Relative air humidity | ≤85% |
抽速pumping | 10m³/h |
真空度vacuum | 10-1Pa |
容油量Oil capacity | 1.1L |
转速Rotation rate | 1450rpm |
噪音Noise | 50dB |
