贝意克小型回转PECVD系统
- 品名： 贝意克小型回转PECVD系统
- 型号： BTF-1200C-R-S-PECVD
- 产品详情
- 规格参数
主要特点Main features
该设备炉管可360度旋转，管内壁有石英挡片帮助粉料翻转有助于烧结得更均匀;
The tube of the equipment can be rotated 360 degrees, and the quartz baffle on the inner wall of the tube helps the powder to be turned over to help the sintering to be more uniform;
可左右大角度倾斜，方便出放料，倾斜角度在0~35°之间;
It can be tilted from left to right at a large angle to facilitate the discharge. The tilt angle is between 0~35°.
该款设备是全自动Plasma增强CVD系统(PECVD)，连续可控温度以及Plasma强度等，配备真空系统，可以实现低压条件下的实验，针对低温石墨烯、碳纳米管生长等。PECVD系统能使整个实验腔体都处于辉光产生区，辉光均匀等效，这种技术很好的解决了传统等离子工作不稳定状态，这样离子化的范围和强度是传统PECVD的百倍，并解决了物料不均匀堆积现象;
The device is a fully automated Plasma Enhanced CVD System (PECVD),can achieve continuous sliding temperature zones and to continuously control the temperature and plasma intensity.Equipped with vacuum unit,can realize experiments under low pressure conditions, such as low temperature graphene and carbon nanotube growth. PECVD system enables the entire experimental cavity to be in the glow generation area, and the glow is evenly equivalent. This technique solves the unstable state of the traditional plasma operation, so the range and intensity of ionization. It is a hundred times more than traditional PECVD and solves the problem of uneven material accumulation.
本款设备可以做金属复合石墨烯材料，是目前**端的金属复合材料制备设备。
Used for prepare metal composite graphene material,is the most high-end preparation equipment for metal composite material
技术参数Technical Parameters
Furnace加热炉 | |
Max. Temp | 1100℃ |
Temperature Controller 控温方式 | lPID automatic control and auto-tune function. 模糊PID控制和自整定调节 l30 programmable segments for precise thermal processing. 智能化30段可编程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超温和断偶报警功能 l10" LCD touch screen and industrial instrumentation dual temperature control 10"液晶触屏与工控仪表双重控温 |
Heating Elements 加热元件 | ·Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝（掺钼铁铬铝合金） |
Temperature Accuracy 控温精度 | +/- 1℃ |
Processing tube 炉管 | ·Size：Φ25*800（middle sizeΦ50*225） 尺寸：Φ25*800（中间部位尺寸Φ50*225） Furnace tube rotation rate：3~13r/min 炉管转速：3~13r/min |
Furnace body inclination angle | 0~35°（adjustable） |
PE source PE源 | |
Signal frequency信号频率 | 13.56 MHz±0.005% |
Power output range功率输出范围 | 0-150W |
RF output interface射频输出接口 | 50 Ω, N-type, female |
Power stability功率稳定性 | ≤5W |
Gas supply system气路系统 | |
High precision mass Flowmeter（Range optional） | 高精度质量流量计（量程可选） |
Accuracy准确度 | ±1.5% |
Response accuracy响应精度 | ·±0.2% |
Response time响应时间 | Gas characteristics：1～4sec 气特性 Electrical characteristics:10sec 电特性 |
Working pressure difference range工作压差范围 | 0.1～0.5MPa |
Max. pressure**压力 | 3MPa |
Connection 连接头类型 | Φ6mmDouble clasp stainless steel joint Φ6mm双卡套不锈钢接头 |
Vacuum unit真空系统 | |
KF25 series bellows and manual stopper valves | 采用KF25系列波纹管和手动挡板阀 |
Vacuum up to10-1Pa | 真空度可达10-1Pa |
The value can be displayed intuitively by the digital display vacuum tester | 数显真空测试仪可直观的显示数值 |
